The ICS 105 set from Langer EMV-Technik is a Near-Probe Scanner for measurements of high frequency near fields above ICs. This IC scanner can measure with a measuring resolution of 50 to 100 µm depending on the ICR near-field microprobe's magnetic and electric fields. It requires a supply of 110/230 V and supports USB interface. This 4-axis positioning system has a max. traverse range of 50 x 50 x 50 mm at α-rotation ±180°, a min. step size of 10 x 10 x 10 µm at α-rotation 1° and a positioning speed of 10 x 10 x 5 mm/s at α-rotation 90°/s. It weighs 23 kg and measures 350 x 400 x 420 mm.